CMP Retaining Rings Made With Victrex Peek Polymer

As a key stage in the fabrication and processing of semiconductor wafers, the CMP stage requires tight process management, tight tolerances, and high quality of surface topography and planarity. The importance of such requirements in the CMP stage is steadily increasing as electronics and related products become smaller every day. The trend toward narrower line widths on the wafer leads to high performance requirements of the property of retaining rings, which are a key part of CMP processing.

CMP retaining rings made by Willbe S&T offer the following advantages:

• The use of VICTREX PEEK polymer has resulted in the lifetime of CMP retaining rings being increased by 50%-100% and increased CMP fabrication yields and cost reduction.

• The front and back of typical CMP rings may separate under high pressure and rotation, which can damage the wafer. However, such accidents are prevented with Willbe’s insert ring method that protects the metal with VICTREX PEEK polymer, preventing dust and the separation of the two parts.

• Slurry used for wafer planarization splatters and sticks on the surface of CMP retaining rings. There are fewer scratches on Willbe’s wafer surfaces because of the inherent lubricity of VICTREX PEEK polymer when compared to stainless steel.

• To help reduce costs, a hole is made in the ring’s side so that the slurry between the inner walls of the retaining ring and the membrane can be removed and the metal inside CMP retaining rings can be reused.

Min Gyu Kim, Managing Director of Willbe S&T, commented on the technical support of Victrex Polymer Solutions team. “Thanks to excellent technical support and quick response of Victrex, we were able to successfully produce a newly designed CMP retaining ring. Ever since we changed the material and the processing method, end-user satisfaction has increased thanks to longer product life and cost reductions.”

“VICTREX PEEK polymer has the best combination of material properties such as chemical resistance, heat resistance and electrical properties, optimal for making CMP retaining rings that have strict property requirements,” said Sang Kook Shim, Senior Market Development Manager of Victrex Korea.