PI’s Miniature 6-Axis Piezo Hexapod for Dynamic Active Error Compensation

Compact & Stiff

With a load capacity of 1500g, this miniature hexapod was designed for dynamic error correction for six degrees of freedom. The parallel-kinematic design with piezo actuator direct drives results in a very compact and stiff positioning solution, compared to conventional multi-axis designs. It is easily mounted inside rotary stages to virtually eliminate wobble and eccentricity errors and can be adapted to other long travel positioning systems for improved multi-axis motion accuracy.

Capacitance direct metrology sensors provide absolute, sub-nanometer precision position feedback with high bandwidth. The stiff, frictionless flexure design enables exceptional responsiveness and accuracy.

Applications Examples of the P-915KWEF

Dynamic optimization of axial runout, eccentricity and evenness of rotation stages, vibration insulation, fine adjustment, used in mechanical manufacturing, machining processes. Features & Advantages

• Very Stiff Design, 1 kHz Natural Frequency, High Dynamics
• 6 Axis System: XYZ, Pitch, Yaw, Roll
• 1 Nanometer Linear Resolution, 0.07µrad Angular Resolution
• Positioning Range up to 70 µm
• Absolute Measuring, Direct Metrology Capacitance Sensors for Closed-Loop Operation
• Space-Saving, Parallel-Kinematics Design for Easy Integration
• Wear-Free Piezo Drives, Operate in Strong Magnetic Fields / High Vacuum