New State Of The Art Air Bearing Gantry System

Typical uses include:
- laser machining
- inspection systems
- pick and place devices
- dispensing systems, and
- gene chip production equipment.

These stages (which may be completely customized) achieve the following standard XY specifications: travel is 600 mm X 600 mm, positional accuracy is 10 microns, positioning repeatability is +/- 1 micron, straightness and flatness is 1 micron. Both X and Y stages are driven by ironless, electrodynamic linear motors with maximum acceleration of 10 m/s² and velocity of 1000 mm/s. Position feedback is accomplished via an incremental linear encoder with a resolution of 50 nm. Typical Z stage performance includes: 25 to 200 mm travel; positional accuracy of 10 microns; and repeatability of +/- 1 micron. A separate motion control option is available based on customer specifictions.