High Precision AirGlide Air Bearing Positioning System

The high-stiffness/ultra-smooth bearing system has a space saving shuttle design that features a high-speed linear brushless servomotor and perfectly suits precise velocity scanning as well as nanometre level step and repeat applications in high throughput production systems or research.

A choice of sub-micron or nanometre resolution encoders in single axis or XY configurations from 150 mm to 1000 mm travel are available and AirGlide's impressive standard specifications include an acceleration capability to 5 m/s2, maximum velocity to 1 m/s and loads up to 40 kg. These application dependant values may be increased and can be adapted for specific customer requirements with Heason and Dover engineering support teams available to assist customers from initial design through to commissioning and beyond.

AirGlide includes a high flex cable management system with standardised termination connectors for simplified integration. Options include low profile Z-theta assemblies in complementary precision grades and wafer vacuum chucks. Additional signal and air lines can be routed to the top plate and customised interfacing fixture plates and complete granite machine bed and frame systems can also be provided. AirGlide's bearing system uses Dover's unique clog-free technology which provides superior reliability whilst eliminating many costly filtration components and the non contacting bearing and motor system combines for almost limitless life with extremely low maintenance.