Semiconductor Equipment Manufacturer Switches From PTFE To VICOTE® Coatings For Spin/Dip Equipment

Frequent maintenance of the spin coating part was a major reason why KPEC switched to the VICOTE Coating. According to Frank Huang, Plant Manager of KPEC Clean Room Division, “When the PTFE coating was placed in an extreme environment with highly acidic/basic chemicals and high temperatures, it stripped off easily after the thermocycle of developing, etching, and stripping. This resulted in frequent maintenance of the spin coating part. However, since we switched to the VICOTE Coating, we have not received any maintenance requests.”

The most crucial and difficult step in the manufacturing process of semiconductors and LCDs is photolithography. Only through the SPIN/DIP process can the stripper, etching and developing solution be completely fabricated on the wafer and the glass substrate. This is done in the most extreme environment involving highly acidic/basic chemicals and high temperature where the equipment’s stability and uniformity can directly affect the yield of wafers and LCD panels.

According to Gary Li, Country Manager of Victrex Taiwan, “The VICOTE Coating helps reduce the particle generation of spin coater during the developing, etching, and stripping processes. This not only extends the equipment lifespan and reduces the need for maintenance, it also significantly enhances the production efficiency and yield of wafers and LCD panels.”

“Because the VICOTE Coating has exceptional abrasion resistance, bonding strength on substrate and chemical resistance,” explained Li, “It can significantly lower the particle generation and withstand most chemical substances. Applying it on the key components of processing equipment can help extend the equipment’s lifespan and reduce the need for maintenance, thus enhancing the production efficiency and yield of wafer and LCD panels for end users. KPEC currently uses the VICOTE Coating on its medium- to large-sized SPIN/DIP equipment series for wafers and LCD panels that are 8” or larger.”

Commenting on the increasing demands of the semiconductor industry, Li said “With the advances toward larger wafer size and higher precision, and an environment involving stronger chemicals and higher temperatures, the introduction of advanced materials and processing techniques becomes key to the industry’s development.”

VICOTE Coatings, based on VICTREX PEEK polymer, offer exceptional scratch and wear resistance, high temperature performance, strength and durability. Eco-friendly VICOTE Coatings were developed to fill the performance gap found in many existing coating technologies today. Whether applied to industrial, automotive, food processing, semiconductor, electronics or pharmaceutical parts, VICOTE Coatings are a great choice for engineers looking to improve the wear performance and life of the coated part in their applications. VICOTE Coatings can be applied using electrostatic or conventional dispersion spray techniques.