MEMs sensors lower costs in vacuum gauges

Posted By : Mick Elliott
MEMs sensors lower costs in vacuum gauges

MEMS thermopile vacuum sensors that deliver an effective range from 1 millitorr (0.13 Pa) to 1 atm (760 torr, or 101 kPa) to eliminate the need for additional sensing technology and to lower overall solution costs have been introduced by Posifa Technologies.

The upper effective range of traditional Pirani vacuum sensors is capped at around 30 torr. To measure vacuum above this value, an additional piezoresistive or capacitive pressure sensor is required.

With their wide effective range, the PVC3000 vacuum sensors can measure vacuum to 1 atm without the need for an additional pressure sensor, allowing designers to replace two components with one in vacuum gauges for HVAC and industrial applications.

To increase reliability, Posifa has also redesigned the microstructure of its sensors to make them more robust and more resistant to pressure shock and the effects of cleaning. The company has migrated to a CMOS production platform, resulting in improved repeatability, uniformity, and scalability.

Using a differential measurement setup (one sensor for reference and one for vacuum measurement), the PVC3000 series allows for automatic internal temperature compensation and eliminates other environmental factors that can cause sensors to drift.

The result is excellent repeatability and long-term stability.

Available in TO5 (PVC3001) or TO46 (PVC3004) metal cans, the devices offer extremely fast response times of < 2 ms typical and operate over a -25 °C to +85 °C temperature range

Readers may contact Posifa to discuss options for customizing the sensors' specifications.

Samples and production quantities of the PVC3000 vacuum sensors are available now. An evaluation kit is also available for testing the devices.

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