With its open frame design, Aerotech's ABL3600 air bearing, linear motor driven X-Y positioning stage is aimed at semiconductor fabrication and test, scanning microscopy and other demanding scan and position applications requiring a large working aperture and perfect precision. Specifications for the 250 mm x 250 mm travel stage include a calibrated positional accuracy of +/- 1 micron, a resolution range between 1 and 200 nanometres, and scanning speeds to 200 mm/sec. Delivered as a completely tested and customer ready motion sub system with an integral granite base and full cable management, the ABL3600 can be customised with wafer chucks or other customer-specific fixtures.