Atomic force microscopy (AFM) permits surface measurements with highest resolution, even down to atomic levels. It enters dimensions that light microscopes can no longer resolve. This is a noncontact procedure. Forces measured between a very fine measuring tip and the object surface give information about the topography, chemical surface condition, defects, etc. This method is used both in research and in production. Typical areas of application include life science technologies, materials research and semiconductor inspection. Precision is required for positioning measuring tip and sample because only on that way a high spatial resolution is achieved. Piezo-based positioning systems are very good for this scanning method because they not only work with sub-nanometer resolution but also have high dynamics.