Nanopositioning stages offer travel ranges of 50 to 250µm

Posted By : Siobhan O'Gorman
Nanopositioning stages offer travel ranges of 50 to 250µm


PI has introduced the PIHera Z flexure-guided piezo nanopositioning stages, offering record travel ranges of 50 to 250µm. Flexure guided piezo positioning stages provide vibrationless motion with virtually unlimited resolution and fast response.

Due to the lack of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimised package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback, usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Cost effective, positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages suitable for applications that require frictionless, vibration-free, positioning with high linearity.

Driven by PI’s proprietary PICMA piezo ceramics, PIHera piezo stages have unique properties especially important in long-term research and industrial applications, including a temperature tolerance range of -20 to 80°C.

These ultra-precise piezo mechanic nanopositioning devices are a result of PI’s 40 years of experience with piezo flexure positioners, developed by the world’s most experienced nanopositioning design teams. PI flexure piezo stages can repeatedly provide nanometre and sub-nanometre size steps, and their high stiffness and advanced control algorithms allow them to move and settle quickly, within a few milliseconds. PI also offers high-speed models that settle in under one millisecond. Flexure stages provide friction-free motion with excellent straightness and flatness data. Similar performance can only be achieved with air bearings and magnetic levitation guiding systems, both technologies also offered by PI.


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