High-resolution positioning system for incremental motions in the nanometer range
15th July 2011
With the new N-664 linear positioning stage, PI (Physik Instrumente) has succeeded in developing a further groundbreaking piezo positioning system of the reference class.
A NEXACT® piezo linear drive replaces the usual stepper or DC servo motor in the N-664, thus making a position resolution of far less than a nanometer possible. Aligned to it is the new PIOne optical linear encoder with a resolution of 0.5 nm, which allows for repeatable incremental motions of 2 nm.
The N-664 is equipped with precise, loadable crossed-roller bearings made of stainless steel. They provide the micro linear positioning stage with the necessary load capacity and guiding accuracy for a dynamic operation with a maximum velocity of 10 mm/s. The PIOne linear encoder uses an interferometric measurement principle and can thereby provide very precise measurement results in the subnanometer range despite high speeds.
As a direct linear drive, the NEXACT® drive is free from precision losses and can keep the position stable even when switched off. The drive does not have to be supplied with current and does not heat up.
Well-known for the high quality of their products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
Low-Cost Three-Channel Controller from PI:
The E-563 control electronics provides maximum resolution in three channels for classic nanopositioning systems. Although the price of this system is less than half of that of a fully digital high-end variant, the user still gets important performance features of PI (Physik Instrumente) controllers.
The E-563 supports the common sensor types used in PI positioning systems. It can be used for positioners with high-precision capacitive sensors and for low-cost systems with strain gauges as well as for open-loop systems. The E-563 is operated using analog interfaces as well as digital ones, such as RS-232 or IEEE-488. Functions such as a display, function generator, LabView driver or macro functionality supplement the offer.
Well-known for the high quality of their products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
Piezo crystalline phase shifter with Picoactuator® technology:
Precision without Position Sensor:
Phase shifters are used in laser measurement to align optical path lengths. These move optics in the range of a wavelength, which corresponds to an adjustment range of less than one micrometer. It is crucial for the alignment to take place quickly and in a stable manner.
For the new S-303.BL phase shifter, PI (Physik Instrumente) replaces classic piezo ceramic PZT actuators (made of lead titanate - lead zirconate) with pico actuators made of a crystalline, lead-free material. These pico actuators are characterized by a particularly high linearity, so that precision positioning is also possible in open-loop operation. With a travel range of 0.3 micrometers, they achieve a precision of 6 nanometers, which corresponds to a linearity of 2%.
In comparison to classic piezo ceramics, however, pico actuators have a smaller displacement. Ideal fields of application are therefore wherever high dynamics, short travel ranges and high precision requirements are necessary.
Open-loop operation does without the use of a position sensor in favor of the system bandwidth and costs. This simplifies the mechanical structure and the electronic control; servo cycle delays do not occur. The S-303.BL is thus a precise yet dynamic drive for optics in the range of a wavelength.
Well-known for the high quality of its products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
As a direct linear drive, the NEXACT® drive is free from precision losses and can keep the position stable even when switched off. The drive does not have to be supplied with current and does not heat up.
Well-known for the high quality of their products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
Low-Cost Three-Channel Controller from PI:
The E-563 control electronics provides maximum resolution in three channels for classic nanopositioning systems. Although the price of this system is less than half of that of a fully digital high-end variant, the user still gets important performance features of PI (Physik Instrumente) controllers.
The E-563 supports the common sensor types used in PI positioning systems. It can be used for positioners with high-precision capacitive sensors and for low-cost systems with strain gauges as well as for open-loop systems. The E-563 is operated using analog interfaces as well as digital ones, such as RS-232 or IEEE-488. Functions such as a display, function generator, LabView driver or macro functionality supplement the offer.
Well-known for the high quality of their products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
Piezo crystalline phase shifter with Picoactuator® technology:
Precision without Position Sensor:
Phase shifters are used in laser measurement to align optical path lengths. These move optics in the range of a wavelength, which corresponds to an adjustment range of less than one micrometer. It is crucial for the alignment to take place quickly and in a stable manner.
For the new S-303.BL phase shifter, PI (Physik Instrumente) replaces classic piezo ceramic PZT actuators (made of lead titanate - lead zirconate) with pico actuators made of a crystalline, lead-free material. These pico actuators are characterized by a particularly high linearity, so that precision positioning is also possible in open-loop operation. With a travel range of 0.3 micrometers, they achieve a precision of 6 nanometers, which corresponds to a linearity of 2%.
In comparison to classic piezo ceramics, however, pico actuators have a smaller displacement. Ideal fields of application are therefore wherever high dynamics, short travel ranges and high precision requirements are necessary.
Open-loop operation does without the use of a position sensor in favor of the system bandwidth and costs. This simplifies the mechanical structure and the electronic control; servo cycle delays do not occur. The S-303.BL is thus a precise yet dynamic drive for optics in the range of a wavelength.
Well-known for the high quality of its products, PI is one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for 40 years now. In addition to its three German factories, PI has eight subsidiaries and a total of over 500 employees worldwide.
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