Piezoceramic stepping drives which combine large travel ranges with resolutions of better than 1 nm (0.001 µm) open up many application areas in nanopositioning. This includes semiconductor manufacturing, testing equipment and wafer inspection as well as nanolithography or nanometrology and active vibration control, e.g. in mechanical engineering. Because precision drives are very reliable, they are used directly there where the motion is required and also where the access is difficult. The facts such as that they are additionally not affected by even strong magnetic fields and safely hold loads also, when powered down, make them interesting for further applications, e.g. in space.