Nanometer resolution offered in compact linear piezo stages

Vibrationless motion, nanometer resolution and below, fast response
Flexure-guided piezo positioning stages deliver vibrationless motion, with virtually unlimited resolution, and fast response in comparison to mechanical bearing-guided motorised systems.

The lack of rolling elements means there is no bearing rumble to affect the uniformity or straightness of the linear motion. PIHera precision closed-loop single stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimised package for high stiffness and long lifetime.

Direct metrology provide stability and linearity compared to inferred metrology feedback, usually based on piezo resistive strain gauges, a technique also available from PI for low cost piezo nanopositioners.

Cost effective and positioning accuracy of 0.02% make these compact stages suitable for applications that require frictionless, vibration-free, positioning with high linearity.

Controllers and software
With the choice of compact single axis controllers, OEM cards and rack mount units for multiple axis solutions are available. LabView drivers, and a plethora of additional software tools are available for easy start-up and integration.

Reliable piezo ceramic drives
Driven by PI’s proprietary PICMA piezo ceramic actuator ‘engines’ PIHera piezo positioning stages have properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80°C.