Dynamic 4-channel digital piezo controller

Applications from microscopy to semiconductor metrology

The E-727 is designed for multi-axis nanopositioning applications, such as 3D imaging in super-resolution microscopy, laser beam steering, image stabilisation in astronomy, and fast alignment applications such as used in fibre alignment and semiconductor CD testing.

In addition to a broad choice of digital high-speed interfaces, such as SPI, Ethernet, and USB (and traditional RS-232), it also provides three additional high-resolution analogue inputs.

Ultra-low noise controller, digital linearisation

Low noise 20-bit DAC and ADC converters provide high resolution and stability. 4 integrated piezo power amplifiers with an output range of -30 to 130V as well as circuitry for capacitive feedback sensors, piezoresistive sensors, and traditional strain gauges are also on board. 

The digital servo provides PID control with two programmable notch filters for higher bandwidth by suppression of mechanical system resonances. Digital linearisation is based on 4^th order polynomials for extreme linearity and absolute positioning accuracy. An optional Dynamic Digital Linearisation (DDL) firmware eliminates phase lag and dynamic non-linearities at high operating frequencies.

Data recorder, auto-calibration ID chip, quick start UP, comprehensive software package

A data recorder for high speed tracing, ID chip compatibility for quick start-up, and exchange of system components without recalibration are also included. The controller comes with extensive software support for LabVIEW and shared libraries for Windows and Linux.

Applications of the E-727

Applications for the new dynamic controller include nanopositioning, nano-automation, semiconductor technology, photonics, bio-nano-technology, metrology, microscopy, micro-manipulation, including cleanroom applications.