XY-Theta Alignment Stage features high resolution

24th April 2018
Posted By : Anna Flockett
XY-Theta Alignment Stage features high resolution

 

Optimas Engineering Systems (OES) has released the XYR-03-01 Alignment Stage, which is a high resolution, high repeatability XY-Theta stage for such applications as: Angular glass cutting and grinding, wafer alignment, semiconductor handling, laser cutting and drilling.

The linear resolution of the X and Y axis is 5µ (non-micro-step) or 0.125µ (20 micro-steps per step motor driver in use), the repeatability is 1.5µ, and positional accuracy is 5µ. The 1mm per-turn lead screws and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of the XYR-03-01 alignment stage.  The linear travel of the X and Y axes is 50x50mm.

The 100mm diameter theta stage is driven by a precision 90:1 ratio worm gear.  The resolution of the theta stage is 0.02O (non Micro-step) or 0.001O (20 Micro-steps per step motor driver in use).  Repeatability is 0.005O, positional Accuracy is 0.01O and backlash is 0.005O

Two-phase stepper motors are standard. The knob for manual adjustments of each axis can be replaced with an incremental encoder for position verification or closed loop operation. These black anodised Aluminium XY-Theta stages are easy to integrate into new or existing systems. Compatible Motion Controllers are available from OES and the XYR-03-01 Alignment Stage can also be ordered as a complete plug-and-play system.


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