Plasma-Therm

More than 145 people from academia and industry attended a workshop on plasma processing presented recently by Plasma-Therm at National Tsing Hua University (NTHU) in Hsinchu, Taiwan. The day-long workshop drew participants from more than 18 companies, as well as students and researchers from seven universities and research institutes in the region. The attendees represented a range of academic disciplines and industrial concerns involved in research and development of devices and structures for which plasma processing technology is often a critical step, including MEMS, waveguides, dielectric deposition and nanostructures.