XYZ Piezo Stages for exceptional 3D positioning accuracy

5th May 2017
Posted By : Anna Flockett
XYZ Piezo Stages for exceptional 3D positioning accuracy

The QNP3 series XYZ piezo positioning stages from Areotech combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40x40mm clear aperture with closed-loop travels up to 100x100x10µm (open-loop travels to 120x120x12µm).

The design is suitable for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation.

Precision Parallel-Kinematic Design
QNP3 piezo stages use an FEA-optimised precision parallel-kinematic flexure and metrology design to ensure superior multi-axis accuracy, high stiffness, and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response.

The patent-pending drive design minimises X and Y yaw errors while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors.

Sub-Nanometer Performance
QNP3 stages are available with closed or open-loop feedback. The capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.

Ultra-Precision Control
When coupled with Aerotech´s Q-series controllers and drives, QNP3 stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high positioning bandwidth.

Advanced software options, such as Dynamic Controls Toolbox and Motion Designer, provide a variety of highly-effective, easy-to-use tools including iterative learning control, harmonic cancellation, and command shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.


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