Interferometer targets machine tool calibration
The new SP1500 C interferometer from SIOS Messtechnik are now available in the UK through Armstrong Optical. The instrument enables synchronous and continuous measurements with 5 degrees of freedom (DOF) for the calibration of linear slides with resolution of <0.1 nm displacement, <0.01 arcsec angular (<50 nRads), and <10 nm straightness.
It has a measuring range of >15m and is designed for high-precision length, angle and straightness measurements of linear axes. The horizontal and vertical components of axis straightness are measured by a rotatable measuring reflector consisting of a combination of hollow retro reflectors and a rotatable Wollaston prism.
The reflector can be combined with a mirror to provide a 90° beam deflection enabling coverage of the most demanding applications.
The intuitive calibration software applies protocols in accord with current international standards and synchronises the calibration processes with the machine tool position controller. Different triggering possibilities for acquisition of measured values are available and data transfer is accomplished with standard USB interface.
The new SP1500 C interferometer has applications in the calibration of high-precision axes in measuring and machine tools, as well as coordinate measuring instruments CMMs.
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