Piezo Positioning Stage and Scanner Family Comes in 60 Variations

Posted By : Jacqueline Regnier
Piezo Positioning Stage and Scanner Family Comes in 60 Variations

PI provides the PIHera family of compact X, XY and Z flexure-guided piezo nanopositioning stages, offering record travel ranges to 1.8 millimeters.

Largest Variety: 60 Models / X, XY, Z, XYZ / 50 to 1800 µm Travel Ranges

The PIHera flexure positioner series offers the largest variety of travel ranges and options of any high precision piezo nanopositioning stage currently available.

PIHera stages come in single axis (horizontal and vertical), two-axis (XY), and XYZ combinations. Travel ranges start at 50µm and go all the way up to 1,800µm (1.8mm) – a record for flexure guided piezo stages.

A total of 60 standard variations are available, including closed-loop, and UHV compatible versions.

Many Control Options, Software Support

PI’s four decades of piezo design experience is also evident in the control options. Options span from compact, low-cost single-channel controllers to complex 12 channel high-output control systems, and from OEM boards to rack mount units.

A choice of advanced digital servo algorithms optimized for piezo drives provide higher throughput, faster settling, and higher disturbance rejection than conventional PID-based controllers, resulting in better stability at the nanometer range and below.

Multiple control interfaces such as TCP/IP, USB, SPI, and even high-bandwidth analog I/O is offered. Controllers come with ample software support, LabView drivers, and diagnosis tools for servo tuning, data recording, and remote access. Motion and control parameters are stored in an ID chip on the stage for seamless controller / piezo mechanics interchangeability and plug-and-play operation.

Application Examples Micro-manufacturing, Photonics and Optics Alignment, Super-Resolution Microscopy, Semiconductor Test Equipment, Scanning Probe Microscopy, Biotechnology, Surface Metrology, Quality Assurance, Nanometrology, Interferometry, Nanopositioning

Features & Advantages

  • No Wear & Tear: Flexures, Actuators, and Sensors are Maintenance-Free
  • Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
  • Frictionless, Maintenance-Free, Precision Flexure Guiding System
  • 50 to 1800 µm Travel Ranges
  • X, XY, Z, and XYZ Versions Available
  • Closed-Loop Digital & Analog Control for up to 99.98% Position Accuracy
  • Vacuum-Compatible Versions
  • Stiff and Compact Design for Millisecond Responsiveness
  • Resolution <1 nm
  • Capacitive Direct-Metrology Sensors for Faster Servo Response

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