Industries such as micro-assembly, semiconductor testing, and automated photonics packaging require multi-axis motion with nanometer precision and dependability. Worldwide nanopositioning equipment leader PI (Physik Instrumente) has engineered and released two new compact multi-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with high stability based on low heat generation and a drift free auto-position-clamping feature.
N-865 high end – low profile 6-axis motion platform, 2nm minimum incremental motion:
This high-end system is based on proprietary PiezoWalklinear motor technology. It provides 2nm minimum incremental motion in X, Y, Z with 0.2 microradian angular motion in Pitch, YAW, and Roll. The N-865 can support loads up to 15N. Integrated proprietary linear encoders measure the position with 0.5 nanometers resolution.
Q-845 compact 6-axis motion platform, 6nm minimum incremental motion:
The Q-845 is high performance, compact 6-axis system based on piezo inertia drives, providing minimum incremental motion as small as 6nm. Integrated linear encoders measure the position with 1 nanometer resolution and provide feedback to the 6-axis controller. The Q-845 supports loads to 10 N and achieves velocities up to 5mm/sec.
Virtual programmable pivot point:
Both 6-axis systems provide software programmable virtual pivot points – a decisive feature for alignment processes such as required in SiP and micro-optics applications.