Parallel motion basis for new positioning systems

Posted By : Anna Flockett
Parallel motion basis for new positioning systems

Industries such as micro-assembly, semiconductor testing, and automated photonics packaging require multi-axis motion with nanometer precision and dependability. Worldwide nanopositioning equipment leader PI (Physik Instrumente) has engineered and released two new compact multi-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with high stability based on low heat generation and a drift free auto-position-clamping feature.

N-865 high end – low profile 6-axis motion platform, 2nm minimum incremental motion:
This high-end system is based on proprietary PiezoWalklinear motor technology. It provides 2nm minimum incremental motion in X, Y, Z with 0.2 microradian angular motion in Pitch, YAW, and Roll. The N-865 can support loads up to 15N. Integrated proprietary linear encoders measure the position with 0.5 nanometers resolution.

Q-845 compact 6-axis motion platform, 6nm minimum incremental motion:
The Q-845 is high performance, compact 6-axis system based on piezo inertia drives, providing minimum incremental motion as small as 6nm. Integrated linear encoders measure the position with 1 nanometer resolution and provide feedback to the 6-axis controller. The Q-845 supports loads to 10 N and achieves velocities up to 5mm/sec.

Virtual programmable pivot point:
Both 6-axis systems provide software programmable virtual pivot points – a decisive feature for alignment processes such as required in SiP and micro-optics applications. 

Downloads


You must be logged in to comment

Write a comment

No comments




Sign up to view our publications

Sign up

Sign up to view our downloads

Sign up

Engineering Design Show 2017
18th October 2017
United Kingdom Ricoh Arena, Coventry
MACH 2018
9th April 2018
United Kingdom NEC, Birmingham